MAPS performance
From Anemos wiki
MAPS in action. 6DoF nano-positioning system in-house demo. Scale in µm.
Sensor performance criteria quoted industry-wide are often ill defined or plain misleading. MAPS performance is assessed in several ways, each with different utility. These specifications are explained here.
Definitions
Precision
Accuracy
Resolution
Noise floor
Repeatability
Conditions
accuracy, resolution, repeatability, noise floor.
