MAPS

Multi-axis Absolute Position Sensor, MAPS, simultaneously measures one to a full six position dimensions, 6DoF, at one point in space with phenomenal accuracy using a single, tiny sensor-head. The patented system includes a patterned scale (the metrological reference or map) which is key to its sensitivity and practically unlimited resolution down to picometre, nanoradians levels. Drastically reducing Abbe and other errors, MAPS revolutionises mechatronics. And all this without cumbersome lasers. System combinations are available at value points covering diverse applications including metrology, machine tools, microscopy, nanotech, robotics, and more. This extraordinary technology is performance proven and traceable to world-renown metrology labs.

Anemos’ revolutionary MAPS (Multi-axis Absolute Position Sensor) technology measures 6DoF position with extraordinary accuracy – one to all six dimensions at the same time using a single, tiny sensor head. The patented system includes a patterned scale (the metrological reference ormap) which is key to MAPS’ sensitivity (down to picometre, nanoradian) and practically unlimited resolution. Scale and sensor system combinations are available at a range of value points to meet accuracy and motion needs over a broad range of applications for metrology, machine tools, microscopy, nanotech, robotics and many others.

This game-changing technology opens new doors to a vast range of applications.

Multi-DOF Measurement

Accurately measuring position in 6 dimensions is a revolutionary idea that drives a whole new mindset in mechanical design providing exceptional possibilities to motion systems design and optimization. Unlike traditional encoders, which can measure only one degree of freedom, unaware of errors in other directions that influence downstream axes; MAPS encoders can measure the errors for one axis and compensate for in the next.

Moreover, no longer do machines require heavy and expensive constraints (mechanical ways and bearings) to force movement into a single highly accurate —therefore measurable— dimension over several individual axes. Instead, move objects with several degrees of freedom while directly compensating for bearing inaccuracies, overcome squareness/parallelism, rotational runout, and stiffness problems. Decimate associated costs with simple, multi-dimensional sensors in both new designs and retrofits. We say: liberate machines with new design freedoms: kinematics unchained!

MAPS System Components

Scale

The scale provides the absolute metrological reference.

Sensor head

The sensors position relative to the scale is what is measured.

Processor

Images captured from the perspective of the sensor are processed to calculate the relative position.

Position Sensors Comparison

Like conventional optical position sensors, MAPS has two main measuring parts: a patterned scale which establishes the metrological reference (essentially a map), and a moving sensor-head that images the scale that is processed to determine absolute position.

At the top end of metrology, MAPS competitive advantages over classic and costly optical interferometers (OI) are significant. OI’s with their incremental and limited interpolation resolution, attendant Abbe errors, susceptibility to atmospheric conditions, arduous setup requirements, and, not least, mono dimensionality. For calibration applications, Anemos sensor systems and application software provide accurate, repeatable metrology tools that are quick and simple to setup and tear down in the field. For instance, drop an Anemos scale onto a CMM/CNC bed, place a MAPS 6DoF sensor in the chuck, drive around and measure in minutes. Come back a week later, repeat and compare. Simple, fast, repeatable, and unbelievably accurate. Compare this with a whole day necessary to setup interferometer systems.

MAPS Products

Anemos MAPS product lines are grouped into three categories according to capability and target applications.

Mistral sensors are mid-performance devices targeted at submicron XY stage, CNC, CMM, or similar calibration tasks.

Scirocco series use high resolution scales yielding sub-nanometre performance for nanotech industries and microscopy.

Zephyr the ultimate in precise metrology. Multi-MAPS sensor arrangements further enhance all 6DoF axes and in particular deliver uncompromising accuracy on all rotational axes simultaneously offering subatomic system resolution.