MAPS performance

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Revision as of 11:34, 5 December 2023 by Gleko (talk | contribs) (The table of results is added.)
MAPS in-house, 6DoF nano-positioning demo. Scale in µm, dots are approximately the size of atoms being measured.

Sensor performance criteria quoted industry-wide are often ill defined or plain misleading. MAPS performance is assessed in several ways, each with different utility. These specifications are explained here.

Definitions

Accuracy

Accuracy measures how close the result is to the actual value we were trying to achieve. The accuracy values shown below are based on our simulated tests.

Precision

Precision measures the consistency of our system and gives information about the relative accuracy in application. High precision is enough if achieving a high global accuracy is not needed but to measure the degree of displacement.

Resolution

Resolution shows the theoretical accuracy of our system, i.e. the absolute limit of the technology.

Noise floor

Noise floor measures the degree of change in a stationary state.

Repeatability

Repeatability shows if the results can reliably be repeated in various setups. In case of the MAPS device experiments have been conducted at NPL (National Physical Laboratory), ant they have been meaningfully repeated in our own laboratory as well as simulated tests.

Conditions

accuracy, resolution, repeatability, noise floor.

Results

1 megapixel 4 megapixel 9 megapixel
Planar position (x, y)
Accuracy 1.12e-06 m 3.37e-07 m 4.46e-07 m
Precision* 2.55e-08 (2.51e-08, 2.59e-08) m 6.80e-08 (6.70e-08, 6.89e-08) m 9.06e-08 (8.94e-08, 9.19e-08) m
Resolution 8.95e-13 m 8.95e-13 m 8.95e-13 m
Noise floor
Repeatability
Measurement range 0.021355 m to 0.02136 m 0.021355 m to 0.02136 m 0.021355 m to 0.02136 m
Depth (z)
Accuracy 4.13e-06 m 1.63e-07 m 1.62e-07 m
Precision* 7.15e-07 (7.05e-07, 7.25e-07) m 1.82e-08 (1.79e-08, 1.84e-08) m 1.85e-08 (1.82e-08, 1.87e-08) m
Resolution 1.22e-13 m 1.22e-13 m 1.22e-13 m
Noise floor
Repeatability
Measurement range 0.0037 m to 0.007 m 0.0037 m to 0.007 m 0.0037 m to 0.007 m
Off-angle (x-, y- axis rotation)
Accuracy 3.50e-02 rad 1.40e-04 rad 1.33e-04 rad
Precision* 1.00e-02 (9.92e-03, 1.02e-02) rad 1.60e-05 (1.57e-05, 1.62e-05) rad 1.59e-05 (1.57e-05, 1.61e-05) rad
Resolution 1.59e-13 rad 1.59e-13 rad 1.59e-13 rad
Noise floor
Repeatability
Measurement range 0 rad to 0.0349065850399 rad 0 rad to 0.0349065850399 rad 0 rad to 0.0349065850399 rad
Planar rotation (z axis)
Accuracy 1.08e-03 rad 2.67e-05 rad 2.51e-05 rad
Precision* 2.21e-05 (2.18e-05, 2.24e-05) rad 2.73e-06 (2.69e-06, 2.77e-06) rad 2.78e-06 (2.74e-06, 2.81e-06) rad
Resolution 1.07e-14 rad 1.07e-14 rad 1.07e-14 rad
Noise floor
Repeatability
Measurement range 0 rad to 0.7853981633974 rad 0 rad to 0.7853981633974 rad 0 rad to 0.7853981633974 rad

* confidence interval for the standard deviation of 10000 random tests at a 95% confidence level

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