MAPS performance: Difference between revisions
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accuracy, resolution, repeatability, noise floor. | accuracy, resolution, repeatability, noise floor. | ||
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[[File:Trochoid | [[File:Trochoid 10nm.gif|left|thumb|Nano-stage motion MAPS measurements.]] | ||
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[[File:Trochoid_1nm.mp4|left|frame]] | |||
Revision as of 20:30, 8 November 2022
MAPS in action in nano-positioning system.
MAPS performance is assessed in several ways with different utility. Sensor performance criteria quoted industry-wide are often ill defined or plain misleading.
Definitions
Accuracy
Resolution
Repeatability
Noise floor
Precision
accuracy, resolution, repeatability, noise floor.
