MAPS performance: Difference between revisions

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accuracy, resolution, repeatability, noise floor.
accuracy, resolution, repeatability, noise floor.
 
[[File:Trochoid 10nm.mp4|thumb]]
[[File:Trochoid 1nm.mp4|frameless]]
[[File:Trochoid 1nm.mp4|frameless]]

Revision as of 20:06, 8 November 2022

MAPS in action in nano-positioning system.

MAPS performance is assessed in several ways with different utility. Sensor performance criteria quoted industry-wide are often ill defined or plain misleading.

Definitions

Accuracy

Resolution

Repeatability

Noise floor

Precision

accuracy, resolution, repeatability, noise floor.